Development of highly efficient NEG pumping system for EBIS

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Title: Development of a Smart Pumping System

In today’s global economy, process plants are under constant pressure to reduce costs. Users can no longer afford their attempts to make pumps bulletproof by upgrading component specifications. The development of a smart pumping system was fostered by a challenge from a major chemical user to reduce the total cost of pump ownership. A smart pumping system was successfully developed that can rea...

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ژورنال

عنوان ژورنال: Review of Scientific Instruments

سال: 2019

ISSN: 0034-6748,1089-7623

DOI: 10.1063/1.5127751